Tribology issues and opportunities in MEMS

by NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS (1997 Columbus, Ohio)

This volume contains the Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, held in Columbus, Ohio, USA, 9-11 November, 1997. Micro Electro Mechanical Systems…